Modeling of Low‐Pressure CVD Processes
نویسندگان
چکیده
منابع مشابه
Numerical Modelling of Cvd Processes and Equipment
A review is given on actual numerical models for CVD equipment and processes. While the basic work concerning the differential equations and the boundary conditions has been established already a decade or more ago, the more recent availability of increased computing power has enabled simulation to become a predictive tool in equipment and process design. The present task in CVD simulation incl...
متن کاملKinetic Processes and Phase-transition of CVD Processes for Ti2SiC3
Abstract In this paper we present a kinetic model based on numerical simulations of a chemical vapor deposition (CVD) process. We discuss a model that is based on kinetics of the deposition rates to the material. Such a kinetic model helps to explain the experimental results and reduce expensive real-life studies. We concentrate on experiments with 3 2 Ti SiC and we verify our model based on te...
متن کاملsurvival regression modeling strategies in cvd prediction
conclusions herein we have described the stata package “adpredsurv” for calculation of the nam-d’agostino x2 goodness of fit test as well as cut point-free and cut point-based nri, relative and absolute idi, and survival-based regression analyses. we hope this work encourages the use of novel methods in examining predictive capacity of the emerging plethora of novel biomarkers. background a fun...
متن کاملIn-situ monitoring for CVD processes
Aiming toward process control of industrial high yield / high volume CVD reactors, the potential of optical sensors as a monitoring tool has been explored. The sensors selected are based on both Fourier transform infrared spectroscopy (FTIR) and tunable diode laser spectroscopy (NIR-DLS). The former has the advantage of wide spectral capability, and well established data bases. NIR-DLS spectros...
متن کاملCVD Growth of SWNTs and MD Modeling
Developments of catalytic CVD generation of single-walled carbon nanotubes (SWNTs) are reviewed with an emphasis on vertically aligned (VA) growth. Following the first realization of VA-SWNTs [1] by alcohol catalytic CVD (ACCVD) method, various techniques are reported for the vertical aligned growth such as control of water [2], point-arc microwave plasma CVD [3], molecular-beam CVD [4], hot-fi...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of The Electrochemical Society
سال: 1982
ISSN: 0013-4651,1945-7111
DOI: 10.1149/1.2123495